Fabrication and characterization of low-temperature poly-si TFTs for AMLCD
The objective of this project was to develop a low temperature poly-Si TFT fabrication process based on the existing clean room facilities at Micro-Fabrication Laboratory in NTU. Low temperature poly-Si TFTs were mainly used for active matrix display applications.
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| Language: | English |
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2009
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| Online Access: | http://hdl.handle.net/10356/19343 |
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| Institution: | Nanyang Technological University |
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sg-ntu-dr.10356-193432023-07-04T15:25:19Z Fabrication and characterization of low-temperature poly-si TFTs for AMLCD Ong, Gim Chye Sun Xiaowei School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering The objective of this project was to develop a low temperature poly-Si TFT fabrication process based on the existing clean room facilities at Micro-Fabrication Laboratory in NTU. Low temperature poly-Si TFTs were mainly used for active matrix display applications. Master of Philosophy (EEE) 2009-12-10T06:19:27Z 2009-12-10T06:19:27Z 2001 2001 Thesis http://hdl.handle.net/10356/19343 en 133 p. application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NTU Library |
| collection |
DR-NTU |
| language |
English |
| topic |
DRNTU::Engineering::Electrical and electronic engineering |
| spellingShingle |
DRNTU::Engineering::Electrical and electronic engineering Ong, Gim Chye Fabrication and characterization of low-temperature poly-si TFTs for AMLCD |
| description |
The objective of this project was to develop a low temperature poly-Si TFT fabrication process based on the existing clean room facilities at Micro-Fabrication Laboratory in NTU. Low temperature poly-Si TFTs were mainly used for active matrix display applications. |
| author2 |
Sun Xiaowei |
| author_facet |
Sun Xiaowei Ong, Gim Chye |
| format |
Theses and Dissertations |
| author |
Ong, Gim Chye |
| author_sort |
Ong, Gim Chye |
| title |
Fabrication and characterization of low-temperature poly-si TFTs for AMLCD |
| title_short |
Fabrication and characterization of low-temperature poly-si TFTs for AMLCD |
| title_full |
Fabrication and characterization of low-temperature poly-si TFTs for AMLCD |
| title_fullStr |
Fabrication and characterization of low-temperature poly-si TFTs for AMLCD |
| title_full_unstemmed |
Fabrication and characterization of low-temperature poly-si TFTs for AMLCD |
| title_sort |
fabrication and characterization of low-temperature poly-si tfts for amlcd |
| publishDate |
2009 |
| url |
http://hdl.handle.net/10356/19343 |
| _version_ |
1772826824377630720 |