Fabrication and characterization of low-temperature poly-si TFTs for AMLCD

The objective of this project was to develop a low temperature poly-Si TFT fabrication process based on the existing clean room facilities at Micro-Fabrication Laboratory in NTU. Low temperature poly-Si TFTs were mainly used for active matrix display applications.

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Bibliographic Details
Main Author: Ong, Gim Chye
Other Authors: Sun Xiaowei
Format: Theses and Dissertations
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/19343
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Institution: Nanyang Technological University
Language: English