Enhanced process monitoring, control & reviewing system

This thesis describes the development, design and implementation of an enhanced Process Monitoring, Control and Reviewing System which helps to eliminate human factors in input controlled, high precision, high value, high speed, long cycle time, mass production processes like semiconductor wafer pro...

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Bibliographic Details
Main Author: Philip, Regi.
Other Authors: Mohamed Zribi
Format: Theses and Dissertations
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/19553
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Institution: Nanyang Technological University
Language: English