Enhanced process monitoring, control & reviewing system

• المؤلف الرئيسي: Philip, Regi.
• مؤلفون آخرون: Mohamed Zribi
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2009
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/19553
• المؤسسة: Nanyang Technological University

This thesis describes the development, design and implementation of an enhanced Process Monitoring, Control and Reviewing System which helps to eliminate human factors in input controlled, high precision, high value, high speed, long cycle time, mass production processes like semiconductor wafer pro...