Enhanced process monitoring, control & reviewing system
This thesis describes the development, design and implementation of an enhanced Process Monitoring, Control and Reviewing System which helps to eliminate human factors in input controlled, high precision, high value, high speed, long cycle time, mass production processes like semiconductor wafer pro...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2009
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| Online Access: | http://hdl.handle.net/10356/19553 |
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| Institution: | Nanyang Technological University |
| Language: | English |