Development, processing and characterization of advanced polymer thin and ultra thin film systems for semiconductor manufacturing and optoelectronic devices

• Main Author: Hu, Xiao.
• Other Authors: School of Materials Science & Engineering
• Format: Research Report
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Materials
• Online Access: http://hdl.handle.net/10356/20681
• Institution: Nanyang Technological University

The project aimed at investigating both generic and unique characteristics concerning functional organic and polymeric thin films. One of the goals was capability development in the related topics ranging from processing or deposition techniques, to the fundamental chemical, physical and engineering...