Fabrication and characterization of microelectronic materials & devices (III)

Fabrication and characterization of microelectronic materials and devices.

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Bibliographic Details
Main Author: Tse, Man Siu.
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/2705
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Institution: Nanyang Technological University
Description
Summary:Fabrication and characterization of microelectronic materials and devices.