Fabrication and characterization of microelectronic materials & devices (III)

Fabrication and characterization of microelectronic materials and devices.

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Bibliographic Details
Main Author:	Tse, Man Siu.
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Online Access:	http://hdl.handle.net/10356/2705
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-2705
record_format	dspace
spelling	sg-ntu-dr.10356-27052023-03-04T03:24:10Z Fabrication and characterization of microelectronic materials & devices (III) Tse, Man Siu. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics Fabrication and characterization of microelectronic materials and devices. RGM 26/97 2008-09-17T09:13:21Z 2008-09-17T09:13:21Z 2000 2000 Research Report http://hdl.handle.net/10356/2705 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics Tse, Man Siu. Fabrication and characterization of microelectronic materials & devices (III)
description	Fabrication and characterization of microelectronic materials and devices.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Tse, Man Siu.
format	Research Report
author	Tse, Man Siu.
author_sort	Tse, Man Siu.
title	Fabrication and characterization of microelectronic materials & devices (III)
title_short	Fabrication and characterization of microelectronic materials & devices (III)
title_full	Fabrication and characterization of microelectronic materials & devices (III)
title_fullStr	Fabrication and characterization of microelectronic materials & devices (III)
title_full_unstemmed	Fabrication and characterization of microelectronic materials & devices (III)
title_sort	fabrication and characterization of microelectronic materials & devices (iii)
publishDate	2008
url	http://hdl.handle.net/10356/2705
_version_	1759857309046013952

Fabrication and characterization of microelectronic materials & devices (III)

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