Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy

Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy

The primary objective of this project is to investigate the optical absorption using photothermal deflection spectroscopy (PDS), C-C bonding structures using Raman spectroscopy and film surface morphology using x-ray reflectivity for diamond-like carbon (DLC) films, which were deposited using either...

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Bibliographic Details
Main Author: Zhang, Qing
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:http://hdl.handle.net/10356/2735
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Institution: Nanyang Technological University
Description
Summary:The primary objective of this project is to investigate the optical absorption using photothermal deflection spectroscopy (PDS), C-C bonding structures using Raman spectroscopy and film surface morphology using x-ray reflectivity for diamond-like carbon (DLC) films, which were deposited using either electron cyclotron resonance chemical vapor deposition (CVD) or plasma enhanced CVD.

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