Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy

The primary objective of this project is to investigate the optical absorption using photothermal deflection spectroscopy (PDS), C-C bonding structures using Raman spectroscopy and film surface morphology using x-ray reflectivity for diamond-like carbon (DLC) films, which were deposited using either...

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Bibliographic Details
Main Author:	Zhang, Qing
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:	http://hdl.handle.net/10356/2735
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-2735
record_format	dspace
spelling	sg-ntu-dr.10356-27352023-03-04T03:22:14Z Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy Zhang, Qing School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials The primary objective of this project is to investigate the optical absorption using photothermal deflection spectroscopy (PDS), C-C bonding structures using Raman spectroscopy and film surface morphology using x-ray reflectivity for diamond-like carbon (DLC) films, which were deposited using either electron cyclotron resonance chemical vapor deposition (CVD) or plasma enhanced CVD. RG 59/96 2008-09-17T09:14:00Z 2008-09-17T09:14:00Z 2000 2000 Research Report http://hdl.handle.net/10356/2735 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Zhang, Qing Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy
description	The primary objective of this project is to investigate the optical absorption using photothermal deflection spectroscopy (PDS), C-C bonding structures using Raman spectroscopy and film surface morphology using x-ray reflectivity for diamond-like carbon (DLC) films, which were deposited using either electron cyclotron resonance chemical vapor deposition (CVD) or plasma enhanced CVD.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Zhang, Qing
format	Research Report
author	Zhang, Qing
author_sort	Zhang, Qing
title	Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy
title_short	Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy
title_full	Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy
title_fullStr	Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy
title_full_unstemmed	Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy
title_sort	characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy
publishDate	2008
url	http://hdl.handle.net/10356/2735
_version_	1759855540632027136

Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy

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