Studies on diamond and diamond-like carbon films

In this study, DLC films were deposited by a Magneticlaly Enhanced Plasma (MEP) CVD in various inert-gas/methane mixture. The deposition rates, mechanical properties and optical of the DLC films as a function of bias voltages and inert-gas/methane ratios are studies, and effects of He, NE and Ar ar...

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Main Authors:	Tan, Hong Siang, Tay, Beng Kang, Shi, Xu
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:	http://hdl.handle.net/10356/2775
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-2775
record_format	dspace
spelling	sg-ntu-dr.10356-27752023-03-04T03:20:31Z Studies on diamond and diamond-like carbon films Tan, Hong Siang Tay, Beng Kang Shi, Xu School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials In this study, DLC films were deposited by a Magneticlaly Enhanced Plasma (MEP) CVD in various inert-gas/methane mixture. The deposition rates, mechanical properties and optical of the DLC films as a function of bias voltages and inert-gas/methane ratios are studies, and effects of He, NE and Ar are compared. RGM 45/97 2008-09-17T09:14:33Z 2008-09-17T09:14:33Z 2001 2001 Research Report http://hdl.handle.net/10356/2775 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Tan, Hong Siang Tay, Beng Kang Shi, Xu Studies on diamond and diamond-like carbon films
description	In this study, DLC films were deposited by a Magneticlaly Enhanced Plasma (MEP) CVD in various inert-gas/methane mixture. The deposition rates, mechanical properties and optical of the DLC films as a function of bias voltages and inert-gas/methane ratios are studies, and effects of He, NE and Ar are compared.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Tan, Hong Siang Tay, Beng Kang Shi, Xu
format	Research Report
author	Tan, Hong Siang Tay, Beng Kang Shi, Xu
author_sort	Tan, Hong Siang
title	Studies on diamond and diamond-like carbon films
title_short	Studies on diamond and diamond-like carbon films
title_full	Studies on diamond and diamond-like carbon films
title_fullStr	Studies on diamond and diamond-like carbon films
title_full_unstemmed	Studies on diamond and diamond-like carbon films
title_sort	studies on diamond and diamond-like carbon films
publishDate	2008
url	http://hdl.handle.net/10356/2775
_version_	1759854064373334016

Studies on diamond and diamond-like carbon films

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