Studies on diamond and diamond-like carbon films

• Main Authors: Tan, Hong Siang, Tay, Beng Kang, Shi, Xu
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• Online Access: http://hdl.handle.net/10356/2775
• Institution: Nanyang Technological University

In this study, DLC films were deposited by a Magneticlaly Enhanced Plasma (MEP) CVD in various inert-gas/methane mixture. The deposition rates, mechanical properties and optical of the DLC films as a function of bias voltages and inert-gas/methane ratios are studies, and effects of He, NE and Ar ar...