Design and frabrication of deposition system for thin film display devices

Design and frabrication of deposition system for thin film display devices.

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Bibliographic Details
Main Author:	Shi, Xu
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:	http://hdl.handle.net/10356/2994
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Institution:	Nanyang Technological University

http://hdl.handle.net/10356/2994

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