Design and frabrication of deposition system for thin film display devices

• Main Author: Shi, Xu
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• Online Access: http://hdl.handle.net/10356/2994
• Institution: Nanyang Technological University

Design and frabrication of deposition system for thin film display devices.