Design and frabrication of deposition system for thin film display devices
Design and frabrication of deposition system for thin film display devices.
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Main Author: | Shi, Xu |
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Other Authors: | School of Electrical and Electronic Engineering |
Format: | Research Report |
Published: |
2008
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/2994 |
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Institution: | Nanyang Technological University |
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