Micromachined pyroelectric infrared detector based on ferroelectric thin films

In this thesis, micromachined pyroelectric infrared detectors based on a novel PZT/PT multilayer ferroelectric thin film have been successfully developed.

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Bibliographic Details
Main Author: Sun, Ling Ling.
Other Authors: Tan, Ooi Kiang
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/3306
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Institution: Nanyang Technological University