Micromachined pyroelectric infrared detector based on ferroelectric thin films
In this thesis, micromachined pyroelectric infrared detectors based on a novel PZT/PT multilayer ferroelectric thin film have been successfully developed.
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/3306 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| Summary: | In this thesis, micromachined pyroelectric infrared detectors based on a novel PZT/PT multilayer ferroelectric thin film have been successfully developed. |
|---|