Micromachined pyroelectric infrared detector based on ferroelectric thin films
In this thesis, micromachined pyroelectric infrared detectors based on a novel PZT/PT multilayer ferroelectric thin film have been successfully developed.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/3306 |
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| Institution: | Nanyang Technological University |