Micromachined pyroelectric infrared detector based on ferroelectric thin films

• Main Author: Sun, Ling Ling.
• Other Authors: Tan, Ooi Kiang
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
• Online Access: http://hdl.handle.net/10356/3306
• Institution: Nanyang Technological University

In this thesis, micromachined pyroelectric infrared detectors based on a novel PZT/PT multilayer ferroelectric thin film have been successfully developed.