Uncooled resonant infrared detector based on aluminum nitride piezoelectric film through charge generations and lattice absorptions
This Letter demonstrates an aluminum nitride (AlN) based uncooled resonant infrared (IR) detector utilizing the photo-sensitive and piezoelectric properties of polycrystalline AlN. The AlN Lamb wave mode resonator is found responsive to IR illuminations by showing a decrease in the S 21 magnitude in...
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Main Authors: | , , , , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2014
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/101698 http://hdl.handle.net/10220/19754 |
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Institution: | Nanyang Technological University |
Language: | English |