Uncooled resonant infrared detector based on aluminum nitride piezoelectric film through charge generations and lattice absorptions

• Main Authors: Tan, Chuan Seng, Kropelnicki, P., Zhu, Y., Randles, A. B., Gu, Y. A., Leong, K. C., Ang, Wan Chia
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2014
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• 在線閱讀: https://hdl.handle.net/10356/101698; http://hdl.handle.net/10220/19754
• 機構: Nanyang Technological University

This Letter demonstrates an aluminum nitride (AlN) based uncooled resonant infrared (IR) detector utilizing the photo-sensitive and piezoelectric properties of polycrystalline AlN. The AlN Lamb wave mode resonator is found responsive to IR illuminations by showing a decrease in the S 21 magnitude in...