Ion gun development/Ion beam etching and deposition system development

Ion gun development/Ion beam etching and deposition system development

Development of ion gun and ion beam etching and deposition system.

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Bibliographic Details
Main Author: Ahn, Jaeshin
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering
Online Access:http://hdl.handle.net/10356/3042
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Institution: Nanyang Technological University

Internet

http://hdl.handle.net/10356/3042

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