Ion gun development/Ion beam etching and deposition system development

Development of ion gun and ion beam etching and deposition system.

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Bibliographic Details
Main Author:	Ahn, Jaeshin
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering
Online Access:	http://hdl.handle.net/10356/3042
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-3042
record_format	dspace
spelling	sg-ntu-dr.10356-30422023-03-04T03:19:41Z Ion gun development/Ion beam etching and deposition system development Ahn, Jaeshin School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering Development of ion gun and ion beam etching and deposition system. RP 11/87 2008-09-17T09:19:22Z 2008-09-17T09:19:22Z 2000 2000 Research Report http://hdl.handle.net/10356/3042 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering Ahn, Jaeshin Ion gun development/Ion beam etching and deposition system development
description	Development of ion gun and ion beam etching and deposition system.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Ahn, Jaeshin
format	Research Report
author	Ahn, Jaeshin
author_sort	Ahn, Jaeshin
title	Ion gun development/Ion beam etching and deposition system development
title_short	Ion gun development/Ion beam etching and deposition system development
title_full	Ion gun development/Ion beam etching and deposition system development
title_fullStr	Ion gun development/Ion beam etching and deposition system development
title_full_unstemmed	Ion gun development/Ion beam etching and deposition system development
title_sort	ion gun development/ion beam etching and deposition system development
publishDate	2008
url	http://hdl.handle.net/10356/3042
_version_	1759853468867100672

Ion gun development/Ion beam etching and deposition system development

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