The substrate cooling effect of ion beam post treatment on ZAO films properties

• المؤلفون الرئيسيون: Wang, Wenna, Zhang, Dawei, Wang, Qi, Tao, Chuanxian, Ni, Zhengji, Zhuang, Songlin, Mei, Ting, Zhang, Dao Hua
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: Conference or Workshop Item
• اللغة: English
• منشور في: 2013
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/97870; http://hdl.handle.net/10220/12197
• المؤسسة: Nanyang Technological University

ZAO thin films with low surface roughness and low sheet resistance are required in the touch panels and display panels. In this work, we investigated the substrate cooling effect of ion beam post treatment on ZAO films properties, and one new way of obtain low surface roughness and low sheet resista...