The substrate cooling effect of ion beam post treatment on ZAO films properties

• Main Authors: Wang, Wenna, Zhang, Dawei, Wang, Qi, Tao, Chuanxian, Ni, Zhengji, Zhuang, Songlin, Mei, Ting, Zhang, Dao Hua
• Other Authors: School of Electrical and Electronic Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/97870; http://hdl.handle.net/10220/12197
• Institution: Nanyang Technological University

ZAO thin films with low surface roughness and low sheet resistance are required in the touch panels and display panels. In this work, we investigated the substrate cooling effect of ion beam post treatment on ZAO films properties, and one new way of obtain low surface roughness and low sheet resista...