Characterisation of a diamond-like carbon deposition process

Characterisation of a diamond-like carbon deposition process

Diamond-like carbon (DLC) films have attracted great interest in several applications in optical and tribological systems, and field emission displays due to its unique properties such as, high optical transparency in the infrared (IR) region, low electron affinity and high chemical inertness. In th...

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Bibliographic Details
Main Author: Tan, Kian Hua.
Other Authors: Yoon, Soon Fatt
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:http://hdl.handle.net/10356/3370
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Institution: Nanyang Technological University
Description
Summary:Diamond-like carbon (DLC) films have attracted great interest in several applications in optical and tribological systems, and field emission displays due to its unique properties such as, high optical transparency in the infrared (IR) region, low electron affinity and high chemical inertness. In this project, DLC films have been deposited using the Electron Cyclotron Resonance Chemical Vapor Deposition (ECR-CVD) technique.

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