Characterisation of a diamond-like carbon deposition process

Diamond-like carbon (DLC) films have attracted great interest in several applications in optical and tribological systems, and field emission displays due to its unique properties such as, high optical transparency in the infrared (IR) region, low electron affinity and high chemical inertness. In th...

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Main Author:	Tan, Kian Hua.
Other Authors:	Yoon, Soon Fatt
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:	http://hdl.handle.net/10356/3370
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-3370
record_format	dspace
spelling	sg-ntu-dr.10356-33702023-07-04T15:20:56Z Characterisation of a diamond-like carbon deposition process Tan, Kian Hua. Yoon, Soon Fatt School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Diamond-like carbon (DLC) films have attracted great interest in several applications in optical and tribological systems, and field emission displays due to its unique properties such as, high optical transparency in the infrared (IR) region, low electron affinity and high chemical inertness. In this project, DLC films have been deposited using the Electron Cyclotron Resonance Chemical Vapor Deposition (ECR-CVD) technique. Master of Engineering 2008-09-17T09:28:40Z 2008-09-17T09:28:40Z 2002 2002 Thesis http://hdl.handle.net/10356/3370 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Tan, Kian Hua. Characterisation of a diamond-like carbon deposition process
description	Diamond-like carbon (DLC) films have attracted great interest in several applications in optical and tribological systems, and field emission displays due to its unique properties such as, high optical transparency in the infrared (IR) region, low electron affinity and high chemical inertness. In this project, DLC films have been deposited using the Electron Cyclotron Resonance Chemical Vapor Deposition (ECR-CVD) technique.
author2	Yoon, Soon Fatt
author_facet	Yoon, Soon Fatt Tan, Kian Hua.
format	Theses and Dissertations
author	Tan, Kian Hua.
author_sort	Tan, Kian Hua.
title	Characterisation of a diamond-like carbon deposition process
title_short	Characterisation of a diamond-like carbon deposition process
title_full	Characterisation of a diamond-like carbon deposition process
title_fullStr	Characterisation of a diamond-like carbon deposition process
title_full_unstemmed	Characterisation of a diamond-like carbon deposition process
title_sort	characterisation of a diamond-like carbon deposition process
publishDate	2008
url	http://hdl.handle.net/10356/3370
_version_	1772828970811654144

Characterisation of a diamond-like carbon deposition process

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