Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
Lead zirconate titanate (PZT) films are promising for MEMS type micro-devices applications because of their high electromechanical coupling coefficients and excellent piezoelectric properties. PZT piezoelectric film integrated on silicon substrate for various MEMS devices has been the subject of con...
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sg-ntu-dr.10356-34042023-07-04T16:39:28Z Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications Chao, Chen Zhu Weiguang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic systems Lead zirconate titanate (PZT) films are promising for MEMS type micro-devices applications because of their high electromechanical coupling coefficients and excellent piezoelectric properties. PZT piezoelectric film integrated on silicon substrate for various MEMS devices has been the subject of considerable attention in recent years. In this thesis, a broad range of work is presented, including the deposition of PZT films onto silicon substrates, the development of a novel interferometric system and related method for piezoelectric characterization of PZT films, as well as the design and fabrication of diaphragm-type piezoelectric micromachined ultrasonic transducer arrays. DOCTOR OF PHILOSOPHY (EEE) 2008-09-17T09:29:25Z 2008-09-17T09:29:25Z 2006 2006 Thesis Chao, C. (2006). Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/3404 10.32657/10356/3404 Nanyang Technological University application/pdf |
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DRNTU::Engineering::Electrical and electronic engineering::Electronic systems Chao, Chen Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications |
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Lead zirconate titanate (PZT) films are promising for MEMS type micro-devices applications because of their high electromechanical coupling coefficients and excellent piezoelectric properties. PZT piezoelectric film integrated on silicon substrate for various MEMS devices has been the subject of considerable attention in recent years. In this thesis, a broad range of work is presented, including the deposition of PZT films onto silicon substrates, the development of a novel interferometric system and related method for piezoelectric characterization of PZT films, as well as the design and fabrication of diaphragm-type piezoelectric micromachined ultrasonic transducer arrays. |
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Zhu Weiguang |
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Zhu Weiguang Chao, Chen |
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Theses and Dissertations |
author |
Chao, Chen |
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Chao, Chen |
title |
Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications |
title_short |
Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications |
title_full |
Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications |
title_fullStr |
Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications |
title_full_unstemmed |
Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications |
title_sort |
piezoelectric films using hybrid technology for ultrasonic array and electronic device applications |
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2008 |
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https://hdl.handle.net/10356/3404 |
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1772826616425086976 |