Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications

Lead zirconate titanate (PZT) films are promising for MEMS type micro-devices applications because of their high electromechanical coupling coefficients and excellent piezoelectric properties. PZT piezoelectric film integrated on silicon substrate for various MEMS devices has been the subject of con...

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Main Author: Chao, Chen
Other Authors: Zhu Weiguang
Format: Theses and Dissertations
Published: 2008
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Online Access:https://hdl.handle.net/10356/3404
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-34042023-07-04T16:39:28Z Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications Chao, Chen Zhu Weiguang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic systems Lead zirconate titanate (PZT) films are promising for MEMS type micro-devices applications because of their high electromechanical coupling coefficients and excellent piezoelectric properties. PZT piezoelectric film integrated on silicon substrate for various MEMS devices has been the subject of considerable attention in recent years. In this thesis, a broad range of work is presented, including the deposition of PZT films onto silicon substrates, the development of a novel interferometric system and related method for piezoelectric characterization of PZT films, as well as the design and fabrication of diaphragm-type piezoelectric micromachined ultrasonic transducer arrays. DOCTOR OF PHILOSOPHY (EEE) 2008-09-17T09:29:25Z 2008-09-17T09:29:25Z 2006 2006 Thesis Chao, C. (2006). Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/3404 10.32657/10356/3404 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Electrical and electronic engineering::Electronic systems
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Electronic systems
Chao, Chen
Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
description Lead zirconate titanate (PZT) films are promising for MEMS type micro-devices applications because of their high electromechanical coupling coefficients and excellent piezoelectric properties. PZT piezoelectric film integrated on silicon substrate for various MEMS devices has been the subject of considerable attention in recent years. In this thesis, a broad range of work is presented, including the deposition of PZT films onto silicon substrates, the development of a novel interferometric system and related method for piezoelectric characterization of PZT films, as well as the design and fabrication of diaphragm-type piezoelectric micromachined ultrasonic transducer arrays.
author2 Zhu Weiguang
author_facet Zhu Weiguang
Chao, Chen
format Theses and Dissertations
author Chao, Chen
author_sort Chao, Chen
title Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
title_short Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
title_full Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
title_fullStr Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
title_full_unstemmed Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
title_sort piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
publishDate 2008
url https://hdl.handle.net/10356/3404
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