Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications

Lead zirconate titanate (PZT) films are promising for MEMS type micro-devices applications because of their high electromechanical coupling coefficients and excellent piezoelectric properties. PZT piezoelectric film integrated on silicon substrate for various MEMS devices has been the subject of con...

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Bibliographic Details
Main Author:	Chao, Chen
Other Authors:	Zhu Weiguang
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic systems
Online Access:	https://hdl.handle.net/10356/3404
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-3404
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spelling	sg-ntu-dr.10356-34042023-07-04T16:39:28Z Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications Chao, Chen Zhu Weiguang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic systems Lead zirconate titanate (PZT) films are promising for MEMS type micro-devices applications because of their high electromechanical coupling coefficients and excellent piezoelectric properties. PZT piezoelectric film integrated on silicon substrate for various MEMS devices has been the subject of considerable attention in recent years. In this thesis, a broad range of work is presented, including the deposition of PZT films onto silicon substrates, the development of a novel interferometric system and related method for piezoelectric characterization of PZT films, as well as the design and fabrication of diaphragm-type piezoelectric micromachined ultrasonic transducer arrays. DOCTOR OF PHILOSOPHY (EEE) 2008-09-17T09:29:25Z 2008-09-17T09:29:25Z 2006 2006 Thesis Chao, C. (2006). Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/3404 10.32657/10356/3404 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electronic systems
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electronic systems Chao, Chen Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
description	Lead zirconate titanate (PZT) films are promising for MEMS type micro-devices applications because of their high electromechanical coupling coefficients and excellent piezoelectric properties. PZT piezoelectric film integrated on silicon substrate for various MEMS devices has been the subject of considerable attention in recent years. In this thesis, a broad range of work is presented, including the deposition of PZT films onto silicon substrates, the development of a novel interferometric system and related method for piezoelectric characterization of PZT films, as well as the design and fabrication of diaphragm-type piezoelectric micromachined ultrasonic transducer arrays.
author2	Zhu Weiguang
author_facet	Zhu Weiguang Chao, Chen
format	Theses and Dissertations
author	Chao, Chen
author_sort	Chao, Chen
title	Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
title_short	Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
title_full	Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
title_fullStr	Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
title_full_unstemmed	Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
title_sort	piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
publishDate	2008
url	https://hdl.handle.net/10356/3404
_version_	1772826616425086976

Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications

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