Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications

Lead zirconate titanate (PZT) films are promising for MEMS type micro-devices applications because of their high electromechanical coupling coefficients and excellent piezoelectric properties. PZT piezoelectric film integrated on silicon substrate for various MEMS devices has been the subject of con...

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Bibliographic Details
Main Author: Chao, Chen
Other Authors: Zhu Weiguang
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:https://hdl.handle.net/10356/3404
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Institution: Nanyang Technological University

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