Scanning inteferometer for characterization of piezoelectric thin films and MEMS devices

• Main Author: Wei, Samuel Maozhe.
• Other Authors: Zhu Weiguang
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering
• Online Access: http://hdl.handle.net/10356/17785
• Institution: Nanyang Technological University

Microelectromechanical systems (MEMS) and nanoelectromechanical systems have been given much attention in recent years. Characterizations of piezoelectric materials are needed to analyze the properties of such materials. However, the piezoelectric properties of thin films have not been sufficiently...