Scanning inteferometer for characterization of piezoelectric thin films and MEMS devices

• المؤلف الرئيسي: Wei, Samuel Maozhe.
• مؤلفون آخرون: Zhu Weiguang
• التنسيق: Final Year Project
• اللغة: English
• منشور في: 2009
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/17785
• المؤسسة: Nanyang Technological University

Microelectromechanical systems (MEMS) and nanoelectromechanical systems have been given much attention in recent years. Characterizations of piezoelectric materials are needed to analyze the properties of such materials. However, the piezoelectric properties of thin films have not been sufficiently...