Scanning inteferometer for characterization of piezoelectric thin films and MEMS devices

• 主要作者: Wei, Samuel Maozhe.
• 其他作者: Zhu Weiguang
• 格式: Final Year Project
• 語言: English
• 出版: 2009
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering
• 在線閱讀: http://hdl.handle.net/10356/17785

Microelectromechanical systems (MEMS) and nanoelectromechanical systems have been given much attention in recent years. Characterizations of piezoelectric materials are needed to analyze the properties of such materials. However, the piezoelectric properties of thin films have not been sufficiently...