Fabrication and characterization of tetrahedral amorphous carbon films for some applications

The filtered cathodic vacuum arc (FCVA) technique has proved to be a promising method for deposition of high quality and large uniformity tetrahedral amorphous carbon (ta-C) films on different substrate materials at room temperature. Our study shows that the predominant factor to determine the sp co...

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Main Author:	Cheah, Li Kang.
Other Authors:	Shi, X.
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
Online Access:	http://hdl.handle.net/10356/3426
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-3426
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spelling	sg-ntu-dr.10356-34262023-07-04T15:17:17Z Fabrication and characterization of tetrahedral amorphous carbon films for some applications Cheah, Li Kang. Shi, X. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials The filtered cathodic vacuum arc (FCVA) technique has proved to be a promising method for deposition of high quality and large uniformity tetrahedral amorphous carbon (ta-C) films on different substrate materials at room temperature. Our study shows that the predominant factor to determine the sp content in the film is the carbon ion energy and the deposition rate. About 88 % of the carbon atoms in the ta-C film deposited with the optimum condition are tetrahedrally bonded which is the same bonding structure as diamond. Doctor of Philosophy (EEE) 2008-09-17T09:29:55Z 2008-09-17T09:29:55Z 1999 1999 Thesis http://hdl.handle.net/10356/3426 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials Cheah, Li Kang. Fabrication and characterization of tetrahedral amorphous carbon films for some applications
description	The filtered cathodic vacuum arc (FCVA) technique has proved to be a promising method for deposition of high quality and large uniformity tetrahedral amorphous carbon (ta-C) films on different substrate materials at room temperature. Our study shows that the predominant factor to determine the sp content in the film is the carbon ion energy and the deposition rate. About 88 % of the carbon atoms in the ta-C film deposited with the optimum condition are tetrahedrally bonded which is the same bonding structure as diamond.
author2	Shi, X.
author_facet	Shi, X. Cheah, Li Kang.
format	Theses and Dissertations
author	Cheah, Li Kang.
author_sort	Cheah, Li Kang.
title	Fabrication and characterization of tetrahedral amorphous carbon films for some applications
title_short	Fabrication and characterization of tetrahedral amorphous carbon films for some applications
title_full	Fabrication and characterization of tetrahedral amorphous carbon films for some applications
title_fullStr	Fabrication and characterization of tetrahedral amorphous carbon films for some applications
title_full_unstemmed	Fabrication and characterization of tetrahedral amorphous carbon films for some applications
title_sort	fabrication and characterization of tetrahedral amorphous carbon films for some applications
publishDate	2008
url	http://hdl.handle.net/10356/3426
_version_	1772827830453796864

Fabrication and characterization of tetrahedral amorphous carbon films for some applications

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