Fabrication and characterization of tetrahedral amorphous carbon films for some applications

• Main Author: Cheah, Li Kang.
• Other Authors: Shi, X.
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
• Online Access: http://hdl.handle.net/10356/3426
• Institution: Nanyang Technological University

The filtered cathodic vacuum arc (FCVA) technique has proved to be a promising method for deposition of high quality and large uniformity tetrahedral amorphous carbon (ta-C) films on different substrate materials at room temperature. Our study shows that the predominant factor to determine the sp co...