Fabrication and characterization of tetrahedral amorphous carbon films for some applications
The filtered cathodic vacuum arc (FCVA) technique has proved to be a promising method for deposition of high quality and large uniformity tetrahedral amorphous carbon (ta-C) films on different substrate materials at room temperature. Our study shows that the predominant factor to determine the sp co...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/3426 |
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| Institution: | Nanyang Technological University |