Implementing plasma induced damage rules in design

• Main Author: Tay, Hwee Chua.
• Other Authors: Tan, Cher Ming
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: http://hdl.handle.net/10356/3429
• Institution: Nanyang Technological University

This dissertation aims to help understand the principles of the plasma-induced damage mechanism and its measurement methods. It is organized into a few chapters to introduce to the readers on the fundamentals, measurements, experiment and findings of plasma-induced damage observe in the manufacturin...