Implementing plasma induced damage rules in design
This dissertation aims to help understand the principles of the plasma-induced damage mechanism and its measurement methods. It is organized into a few chapters to introduce to the readers on the fundamentals, measurements, experiment and findings of plasma-induced damage observe in the manufacturin...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/3429 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| Summary: | This dissertation aims to help understand the principles of the plasma-induced damage mechanism and its measurement methods. It is organized into a few chapters to introduce to the readers on the fundamentals, measurements, experiment and findings of plasma-induced damage observe in the manufacturing line in IC industry. |
|---|