Implementing plasma induced damage rules in design

This dissertation aims to help understand the principles of the plasma-induced damage mechanism and its measurement methods. It is organized into a few chapters to introduce to the readers on the fundamentals, measurements, experiment and findings of plasma-induced damage observe in the manufacturin...

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Bibliographic Details
Main Author:	Tay, Hwee Chua.
Other Authors:	Tan, Cher Ming
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Online Access:	http://hdl.handle.net/10356/3429
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-3429
record_format	dspace
spelling	sg-ntu-dr.10356-34292023-07-04T15:16:19Z Implementing plasma induced damage rules in design Tay, Hwee Chua. Tan, Cher Ming School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics This dissertation aims to help understand the principles of the plasma-induced damage mechanism and its measurement methods. It is organized into a few chapters to introduce to the readers on the fundamentals, measurements, experiment and findings of plasma-induced damage observe in the manufacturing line in IC industry. Master of Science (Microelectronics) 2008-09-17T09:30:02Z 2008-09-17T09:30:02Z 2003 2003 Thesis http://hdl.handle.net/10356/3429 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics Tay, Hwee Chua. Implementing plasma induced damage rules in design
description	This dissertation aims to help understand the principles of the plasma-induced damage mechanism and its measurement methods. It is organized into a few chapters to introduce to the readers on the fundamentals, measurements, experiment and findings of plasma-induced damage observe in the manufacturing line in IC industry.
author2	Tan, Cher Ming
author_facet	Tan, Cher Ming Tay, Hwee Chua.
format	Theses and Dissertations
author	Tay, Hwee Chua.
author_sort	Tay, Hwee Chua.
title	Implementing plasma induced damage rules in design
title_short	Implementing plasma induced damage rules in design
title_full	Implementing plasma induced damage rules in design
title_fullStr	Implementing plasma induced damage rules in design
title_full_unstemmed	Implementing plasma induced damage rules in design
title_sort	implementing plasma induced damage rules in design
publishDate	2008
url	http://hdl.handle.net/10356/3429
_version_	1772827388035465216

Implementing plasma induced damage rules in design

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