Zinc oxide thin films nanostructures metal organic chemical vapor deposition

In this dissertation, the investigation on growth and post-growth annealing treatment of ZnO thin films, deposited by a home-made metal organic chemical vapor deposition (MOCVD), is presented. The growth of the ZnO thin films was studied with various growth parameters and reactor designs. ZnO quantu...

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Main Author: Tan, Swee Tiam
Other Authors: Lo Guoqiang
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:https://hdl.handle.net/10356/3516
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-35162023-07-04T16:56:00Z Zinc oxide thin films nanostructures metal organic chemical vapor deposition Tan, Swee Tiam Lo Guoqiang Zhang Xinhai Sun Xiaowei School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics In this dissertation, the investigation on growth and post-growth annealing treatment of ZnO thin films, deposited by a home-made metal organic chemical vapor deposition (MOCVD), is presented. The growth of the ZnO thin films was studied with various growth parameters and reactor designs. ZnO quantum dots embedded films, highly c-axis oriented ZnO films, p-type ZnO thin films and ZnO nanostructures were fabricated and investigated. DOCTOR OF PHILOSOPHY (EEE) 2008-09-17T09:31:29Z 2008-09-17T09:31:29Z 2007 2007 Thesis Tan, S. T. (2007). Zinc oxide thin films nanostructures metal organic chemical vapor deposition. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/3516 10.32657/10356/3516 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
Tan, Swee Tiam
Zinc oxide thin films nanostructures metal organic chemical vapor deposition
description In this dissertation, the investigation on growth and post-growth annealing treatment of ZnO thin films, deposited by a home-made metal organic chemical vapor deposition (MOCVD), is presented. The growth of the ZnO thin films was studied with various growth parameters and reactor designs. ZnO quantum dots embedded films, highly c-axis oriented ZnO films, p-type ZnO thin films and ZnO nanostructures were fabricated and investigated.
author2 Lo Guoqiang
author_facet Lo Guoqiang
Tan, Swee Tiam
format Theses and Dissertations
author Tan, Swee Tiam
author_sort Tan, Swee Tiam
title Zinc oxide thin films nanostructures metal organic chemical vapor deposition
title_short Zinc oxide thin films nanostructures metal organic chemical vapor deposition
title_full Zinc oxide thin films nanostructures metal organic chemical vapor deposition
title_fullStr Zinc oxide thin films nanostructures metal organic chemical vapor deposition
title_full_unstemmed Zinc oxide thin films nanostructures metal organic chemical vapor deposition
title_sort zinc oxide thin films nanostructures metal organic chemical vapor deposition
publishDate 2008
url https://hdl.handle.net/10356/3516
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