Zinc oxide thin films nanostructures metal organic chemical vapor deposition
In this dissertation, the investigation on growth and post-growth annealing treatment of ZnO thin films, deposited by a home-made metal organic chemical vapor deposition (MOCVD), is presented. The growth of the ZnO thin films was studied with various growth parameters and reactor designs. ZnO quantu...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | https://hdl.handle.net/10356/3516 |
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| Institution: | Nanyang Technological University |