Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration
261 p.
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| Main Author: | |
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| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2010
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/36128 |
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| Institution: | Nanyang Technological University |
| Summary: | 261 p. |
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