Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration

261 p.

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Bibliographic Details
Main Author:	Chen, Bangtao
Other Authors:	Wang Shao
Format:	Theses and Dissertations
Published:	2010
Subjects:	DRNTU::Engineering::Manufacturing::Product design
Online Access:	https://hdl.handle.net/10356/36128
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-36128
record_format	dspace
spelling	sg-ntu-dr.10356-361282023-03-11T17:25:44Z Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration Chen, Bangtao Wang Shao Miao Jianmin School of Mechanical and Aerospace Engineering DRNTU::Engineering::Manufacturing::Product design 261 p. Actuators are the key components that produce the mechanical output and perform physical functions of particular systems. Electrostatic actuators are widely used in micro electromechanical systems (MEMS) applications for their combining versatility and simple technology. In this thesis, an electrostatic microactuator fabricated on silicon-on-glass (SOG) is studied. DOCTOR OF PHILOSOPHY (MAE) 2010-04-23T02:29:38Z 2010-04-23T02:29:38Z 2007 2007 Thesis Chen, B. (2007). Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/36128 10.32657/10356/36128 application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Manufacturing::Product design
spellingShingle	DRNTU::Engineering::Manufacturing::Product design Chen, Bangtao Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration
description	261 p.
author2	Wang Shao
author_facet	Wang Shao Chen, Bangtao
format	Theses and Dissertations
author	Chen, Bangtao
author_sort	Chen, Bangtao
title	Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration
title_short	Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration
title_full	Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration
title_fullStr	Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration
title_full_unstemmed	Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration
title_sort	development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration
publishDate	2010
url	https://hdl.handle.net/10356/36128
_version_	1761781512939765760

Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration

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