Material characterization and device design of TiNx infrared microemitter
This thesis systematically studies the electrical and thermal properties of TiN films deposited by the filtered arc deposition (FAD) method. The properties of deposited TiN films are analyzed by means of multiple characterization tools.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/3668 |
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| Institution: | Nanyang Technological University |
| Summary: | This thesis systematically studies the electrical and thermal properties of TiN films deposited by the filtered arc deposition (FAD) method. The properties of deposited TiN films are analyzed by means of multiple characterization tools. |
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