Material characterization and device design of TiNx infrared microemitter

This thesis systematically studies the electrical and thermal properties of TiN films deposited by the filtered arc deposition (FAD) method. The properties of deposited TiN films are analyzed by means of multiple characterization tools.

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Bibliographic Details
Main Author:	Wang, Jun Min.
Other Authors:	Mei, Ting
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering
Online Access:	http://hdl.handle.net/10356/3668
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-3668
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spelling	sg-ntu-dr.10356-36682023-07-04T15:49:37Z Material characterization and device design of TiNx infrared microemitter Wang, Jun Min. Mei, Ting School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering This thesis systematically studies the electrical and thermal properties of TiN films deposited by the filtered arc deposition (FAD) method. The properties of deposited TiN films are analyzed by means of multiple characterization tools. Master of Engineering 2008-09-17T09:34:51Z 2008-09-17T09:34:51Z 2004 2004 Thesis http://hdl.handle.net/10356/3668 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering Wang, Jun Min. Material characterization and device design of TiNx infrared microemitter
description	This thesis systematically studies the electrical and thermal properties of TiN films deposited by the filtered arc deposition (FAD) method. The properties of deposited TiN films are analyzed by means of multiple characterization tools.
author2	Mei, Ting
author_facet	Mei, Ting Wang, Jun Min.
format	Theses and Dissertations
author	Wang, Jun Min.
author_sort	Wang, Jun Min.
title	Material characterization and device design of TiNx infrared microemitter
title_short	Material characterization and device design of TiNx infrared microemitter
title_full	Material characterization and device design of TiNx infrared microemitter
title_fullStr	Material characterization and device design of TiNx infrared microemitter
title_full_unstemmed	Material characterization and device design of TiNx infrared microemitter
title_sort	material characterization and device design of tinx infrared microemitter
publishDate	2008
url	http://hdl.handle.net/10356/3668
_version_	1772826340613947392

Material characterization and device design of TiNx infrared microemitter

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