Latchup analysis of deep submicrometer CMOS devices

The effects of the following factors and their combinations on latchup behaviour of a Shallow Trench Isolation (STI) CMOS latchup test structure are studied: Varying both the STI dimensions and geometry parameters of the test structure. Varying the biasing conditions of the test structure. Changing...

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Bibliographic Details
Main Author: Chen, Hong Lei.
Other Authors: Yeo, Kiat Seng
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/3671
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Institution: Nanyang Technological University