Material characterization using electron beam induced current

Material characterization using electron beam induced current

This research work presented in this thesis is concerned with the determination of material parameters of a semiconductor specimen from the EBIC signals.

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Bibliographic Details
Main Author: Wu, Det Hau.
Other Authors: Ong, Vincent Keng Sian
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:http://hdl.handle.net/10356/3762
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Institution: Nanyang Technological University
Description
Summary:This research work presented in this thesis is concerned with the determination of material parameters of a semiconductor specimen from the EBIC signals.

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