Material characterization using electron beam induced current

• Main Author: Wu, Det Hau.
• Other Authors: Ong, Vincent Keng Sian
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• Online Access: http://hdl.handle.net/10356/3762
• Institution: Nanyang Technological University

This research work presented in this thesis is concerned with the determination of material parameters of a semiconductor specimen from the EBIC signals.