Material characterization using electron beam induced current

This research work presented in this thesis is concerned with the determination of material parameters of a semiconductor specimen from the EBIC signals.

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Bibliographic Details
Main Author:	Wu, Det Hau.
Other Authors:	Ong, Vincent Keng Sian
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:	http://hdl.handle.net/10356/3762
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-3762
record_format	dspace
spelling	sg-ntu-dr.10356-37622023-07-04T16:28:05Z Material characterization using electron beam induced current Wu, Det Hau. Ong, Vincent Keng Sian School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials This research work presented in this thesis is concerned with the determination of material parameters of a semiconductor specimen from the EBIC signals. Doctor of Philosophy (EEE) 2008-09-17T09:37:00Z 2008-09-17T09:37:00Z 2003 2003 Thesis http://hdl.handle.net/10356/3762 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Wu, Det Hau. Material characterization using electron beam induced current
description	This research work presented in this thesis is concerned with the determination of material parameters of a semiconductor specimen from the EBIC signals.
author2	Ong, Vincent Keng Sian
author_facet	Ong, Vincent Keng Sian Wu, Det Hau.
format	Theses and Dissertations
author	Wu, Det Hau.
author_sort	Wu, Det Hau.
title	Material characterization using electron beam induced current
title_short	Material characterization using electron beam induced current
title_full	Material characterization using electron beam induced current
title_fullStr	Material characterization using electron beam induced current
title_full_unstemmed	Material characterization using electron beam induced current
title_sort	material characterization using electron beam induced current
publishDate	2008
url	http://hdl.handle.net/10356/3762
_version_	1772826844839542784

Material characterization using electron beam induced current

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