Three-dimensional (3D) finite element modeling of stress distribution and migration in Cu interconnects

56 p.

Saved in:
Bibliographic Details
Main Author: Anson Heryanto
Other Authors: Pey Kin Leong
Format: Theses and Dissertations
Published: 2010
Subjects:
Online Access:http://hdl.handle.net/10356/39142
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University