Deposition and characterization of carbon thin films by varying substrate bias and temperature

• 主要作者: Chow, Wai Leong.
• 其他作者: Tay Beng Kang
• 格式: Final Year Project
• 語言: English
• 出版: 2010
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• 在線閱讀: http://hdl.handle.net/10356/40026

The carbon film composition in terms of sp2 or sp3 can differs by varying different deposition techniques and/or parameters. In this project, Filtered Cathodic Vacuum Arc (FCVA) deposition technique is used while in-situ substrate bias and temperature are being varied. For substrate bias, there may...